Deposition facility

CESAR (Advanced Energy) RF power generator and ArF excimer laser source, model COMPexPro Lambda Physics (Coherent Inc.)


Multi-sample electrical measurement system.

Four-point electrical measurement system

Model KEITHLEY 6220/2182A.

X-ray diffractometer

Model EMPYREAN (PANalytical).


Model CARBOLITE 3216.

IR lamp heating system

Model MILA-5000 (ULVAC Technologies Inc.).

Digital megohmeter

Measurement of high electrical resistance.

RF magnetron sputtering deposition facility

Model VARIAN ER 3119 EletroRava.

Vacuum thermal evaporation deposition facility

Model Balzers.

Quantum efficiency measurement equipment

Model Protoflex QE 1400.